Fig. 3
From: Optimizing the fabrication of a 3D high-resolution implant for neural stimulation
UV dose effect on the SU-8 patterning. a) An extreme underexposure dose leading to low mechanical strength and rupturing of the film. b) Underexposure dose leading to the expansion (22 µm) of the micro-wells and the fusion of adjacent wells. c) Extreme overexposure, leading to the closing and reduced diameter of the micro-wells. d) Optimal UV dose resulting in perfectly circularly shaped micro-wells of the desired diameter (20 µm). Scale bar - 50 µm in all figures